Preparation of Barium Strontium Titanate Thin Films by Liquid Source Chemical Vapor Deposition.
نویسندگان
چکیده
منابع مشابه
High tunability in compositionally graded epitaxial barium strontium titanate thin films by pulsed-laser deposition
Compositionally graded barium strontium titanate @(BaxSr12x)TiO3—BST, x50.75, 0.8, 0.9, and 1.0# thin films are fabricated by pulsed-laser deposition on a LaAlO3 substrate with (La0.7Sr0.3)MnO3 as the bottom electrode. A high dielectric permittivity and temperature characteristic without Curie–Weiss law are obtained. A tunability of over 70% is obtained at frequency of 1 MHz, which is higher th...
متن کاملPreparation of Bismuth Titanate Films by Electron Cyclotron Resonance Plasma Sputtering-Chemical Vapor Deposition
Bismuth titanate (Bi,Ti,O,, :BIT) thin films were prepared on the Pt courted MgO(100) substrate by electron cyclotron resonance plasma sputtering-chemical vapor deposition (ECR plasma sputtering-CVD). Bi20, was used as a sputtering target and tetra-isopropoxy-titanium [Ti(i-C3H70)4] as a CVD source. The composition of films was controlled by changing RF power (P,,) of Bi,O, target and Ti source...
متن کاملRealization of high tunability barium strontium titanate thin films by rf magnetron sputtering
Ferroelectric thin films are currently being used to develop tunable microwave circuits based on the electric-field dependence of the dielectric constant. (Ba0.5Sr0.5)TiO3 ~BST! films prepared by sputtering on Pt/TiO2 /SiO2 /Si substrates are found to exhibit a capacitance change ~tunability! of nearly 4:1. Higher tunability has been attributed to the ~100! texturing of the BST films and is a r...
متن کاملCharacteristics of the surface layer of barium strontium titanate thin films deposited by laser ablation
Ba0.5Sr0.5TiO3 ~BST! thin films grown on Si by an in situ ultraviolet-assisted pulsed laser deposition ~UVPLD! technique exhibited significantly higher dielectric constant and refractive index values and lower leakage current densities than films grown by conventional PLD under similar conditions. X-ray photoelectron spectroscopy ~XPS! investigations have shown that the surface layer of the gro...
متن کاملOptical Properties of Nitrogen-Substituted Strontium Titanate Thin Films Prepared by Pulsed Laser Deposition
Perovskite-type N-substituted SrTiO3 thin films with a preferential (001) orientation were grown by pulsed laser deposition on (001)-oriented MgO and LaAlO3 substrates. Application of N2 or ammonia using a synchronized reactive gas pulse produces SrTiO3-x:Nx films with a nitrogen content of up to 4.1 at.% if prepared with the NH3 gas pulse at a substrate temperature of 720 °C. Incorporating nit...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: SHINKU
سال: 1999
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.42.368